China Chip Etching Breakthrough: Binhua Group Mass Produces 6N Grade High-Purity Hydrogen Fluoride, Breaking Overseas Monopoly on Semiconductor Chemical Etchant
Binhua Group subsidiary Dasheng Core Materials achieves mass production of 6N grade high-purity hydrogen fluoride for sub-28nm chip manufacturing, breaking foreign monopoly on the semiconductor etchant market.

Binhua Group has announced through subsidiary Dasheng Core Materials the successful mass production of 6N grade high-purity hydrogen fluoride, a critical semiconductor etching and cleaning chemical essential for sub-28nm advanced chip manufacturing. The breakthrough, certified on July 19 at a product launch event in Binzhou, Shandong Province, fills a gap in the province high-purity hydrogen fluoride capacity and adds key support for the domestic chip manufacturing supply chain. Hydrogen fluoride is known as the chemical carving knife of the semiconductor industry, indispensable for etching and cleaning processes during chip fabrication.
The 6N grade defines purity at 99.9999%, with key metal ion impurity content below 1 ppb, matching international first-class standards. The gap between 5N and 6N may appear marginal in decimal places but is decisive in practical impact: in chip manufacturing, metal impurity levels just a few ppb higher can cause significant yield degradation.
Currently, foreign companies hold approximately 80% of the global 6N grade high-purity hydrogen fluoride market, with prices exceeding 2 million yuan per ton. The vast majority of domestic production has been limited to 5N grade, making 6N a classic bottleneck material for China semiconductor supply chain independence.The technical breakthrough is not a single-point achievement but a full-system innovation covering four core technology areas: multi-distillation coupling, low-precipitation equipment material selection, cylinder clean protection, and trace impurity precision detection.
These technologies collectively solve the secondary contamination challenge spanning production, storage, and transportation. The company has completed construction and commissioning of a 50-ton-per-year high-purity hydrogen fluoride cylinder filling line, and obtained the cylinder filling license from Shandong Special Equipment Inspection Institute on July 16, establishing complete production, filling, and sales qu
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